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Magnetron Sputtering Facility

Research Group in Charge:

Prof. Dr. Jürgen Janek

 

Platform:

Thin-Film and Epitaxy Laboratory (DünE)

 

Location:

Chemistry Building, Heinrich-Buff-Ring 17, room B 44

 

Type, properties, other information:

Surface, with glovebox; exclusively for depositing LiPON films

 

Person in Charge:

Dr. Joachim Sann

Institute of Physical Chemistry

Chemistry building, Heinrich-Buff-Ring 17, Room A 13a

Phone +49-641-99-34506