Atomic Layer Deposition https://www.uni-giessen.de/en/faculties/research-centers/materials/team-topics/people/topics-collection/methods/atomic-layer-deposition https://www.uni-giessen.de/@@site-logo/logo.png Document Actions Atomic Layer Deposition Atomic Layer Deposition Becker, Martin Thin-Film Technology Schörmann, Jörg Thin-Film Technology