Electron-Gun Vapor Deposition
Research Group in Charge:
Platform:
Micro- and Nanofabrication Laboratory (MiNaLab)
Location:
Physics Building, Heinrich-Buff-Ring 16, room 406
Type, properties, other information:
(no description available)
Person in Charge:
Dr. Torsten Henning
Institute of Experimental Physics I
Physics Building, Heinrich-Buff-Ring 16, room 429
Phone +49-641-99-33191