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3D Microlithography

Platzhalter 400x300 px

Research Group in Charge:

Prof. Dr. Peter J. Klar

 

Platform:

Micro- and Nanofabrication Laboratory (MiNaLab)

 

Location:

Physics Building, Heinrich-Buff-Ring 16, room 406

 

Type, properties, other information:

Nanoscribe PPGT


Person in Charge:

Dr. Torsten Henning

Institute of Experimental Physics I

Physics Building, Heinrich-Buff-Ring 16, room 429

Phone +49-641-99-33191