Schörmann, Jörg
Thin-Film Technology
The research focus is on the production of thin oxide- and nitride layers as well as nanostructures from group III-nitrides. The applications of these structures are in optoelectronics and sensor technology. Plasma-assisted molecular beam epitaxy (PAMBE) and atomic layer deposition (ALD) are used as manufacturing processes. Various methods such as high-resolution X-ray diffraction (XRD), atomic force microscopy (AFM), photoluminescence spectroscopy (PL) etc. are available for characterization within the framework of the Center for Materials Research.
Contact
Dr. Jörg Schörmann
Institute of Experimental Physics I
Phone: +49-641-99-33122
Fax: +49-641-99-33139
Physics building, Heinrich-Buff-Ring 16, Room 334
e-Mail | Homepage
Applications/Functionalities:
- Semiconductor Devices
- Surface Technologies
- Optical Materials
Methods:
- Atomic Layer Deposition
- Micro and Nanofabrication
- Optical Spectroscopy
- Physical Deposition
- X-Ray Scattering Methods
- Structural Analytics
Classes of Materials:
- Thin Films
- Semiconductors
- Hybrid Materials
- Molecular Materials
- Nanomaterials
- Oxides